In this particular paper, The brand new lapping slurry and polishing slurry are released. Along with the deliquescence diploma of CLBO is fallen to least expensive. A brand new Doing work technology is additionally adopted. After rough polishing, the focus of extremely-precision sharpening slurry is greater adequately. So does the extremely-precision sharpening speed, plus the wiping pace is faster compared to deliquescence speed. The CLBO crystal surface area roughness can accomplish 1nm and retain the floor good quality effectively. Access by means of your institution
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We summarized The present improvement position in the superior-electricity DUV laser each within the wavelength of FHG in the one-μm laser and at 193 nm. The modern improvement with the reliable-point out/fiber laser, in addition to the nonlinear optical crystals, prompts not just the normal energy and also the beam quality (coherence) with the DUV lasers to an unparalleled level.
As an illustration, The present concave OC could be replaced by a airplane mirror which could mitigate the ability density about the surface of M1 as well as diamond. Furthermore, making use of higher damage threshold coatings for M1 and diamond would also Enhance the output energy with no damages. Then, the NIR laser at the 2nd Stokes wavelength may very well be higher plenty of, along with its fantastic beam good quality, to generate the final DUV laser at 193 nm that has a higher regular electric power.
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As a result of thermal lens impact within the good-point out lasers, if the heating management is inadequate, It isn't uncomplicated to get the good-condition laser which has a higher ability and a significant beam high quality at the same time. Lately, with the development of The skinny disk laser and one-crystal fiber (SCF) laser, a higher-electric power laser at the elemental wavelength (1 μm) had been realized with a fantastic beam quality even with a TEM00 mode beam [4,24], which would be excellent candidates for the basic with the DUV laser technology. A further prospect for the elemental could be the superior-electric power fiber laser which can be obtained by coherent beam blend with M2 price below 1.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the best non-linear crystal which generates ultraviolet harmonics in the Nd:YAG basic laser wavelength. As a way to greatly enhance the destruction threshold, small CLBO floor roughness, by ultra-precision machining, is necessary. Since the CLBO crystal has straightforward hydroscopic reaction and micro scratches in machining, extremely-precise machining of your CLBO crystal can be a complicated complex difficulty.
Tunable ultraviolet laser resource according to stable-condition dye laser technology and CsLiB6O10 harmonic era
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